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작성일 : 14-09-21 12:58
| 연구단계 | 1단계 :1년차 | ||
| 논문제목(영문) | Selective nano-patterning of graphene using a heated atomic force microscope tip. | ||
| 국내외구분 | 국외 | SCI여부 | SCI |
| 연구책임자역활 | 교신저자 | 논문기여율 | 30% |
| 주저자명 | Choi YS | ||
| 교신저자명 | Lee DW | ||
| 공동저자명 | Wu X | ||
| 게제년월일 | 2014-04-01 | ||
| ISSN | 0034-6748 | ||
| Impact Factor | 1.584 | ||
| 학술지명 | Rev Sci Instrum | ||
| 서지사항 | 0집 / 85권 / 4호, 페이지(045002 - 045002) | ||
| 병기표기 | 단독 | ||
| Acknowledgement 기재여부 |
예
※ Acknowledgement가 기재된 논문만 연구과제의 성과로 인정. - 국문 표기 : "본 연구는 보건복지부 보건의료연구개발사업의 지원에 의하여 이루어진 것임. (HI13C1527)" - 영문 표기 : "This study was supported by a grant of the Korean Health Technology R&D Project, (HI13C1527) Ministry of Health & Welfare, Republic of Korea. " |
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| 요약초록문 (Abstract) 입력 |
In this study, we introduce a selective thermochemical nano-patterning method of graphene on insulating substrates. A tiny heater formed at the end of an atomic force microscope (AFM) cantilever is optimized by a finite element method. The cantilever device is fabricated using conventional micromachining processes. After preliminary tests of the cantilever device, nano-patterning experiments are conducted with various conducting and insulating samples. The results indicate that faster scanning speed and higher contact force are desirable to reduce the sizes of nano-patterns. With the experimental condition of 1 μm/s and 24 mW, the heated AFM tip generates a graphene oxide layer of 3.6 nm height and 363 nm width, on a 300 nm thick SiO2 layer, with a tip contact force of 100 nN. |
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